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Wang K. Green Etching Techniques for MEMS Applications...2025
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Tilli M. Handbook of Silicon Based MEMS Materials and Tech 2ed 2015
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Iannacci J. Practical Guide to RF-MEMS 2013
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Banks D. Microengineering, MEMS, and Interfacing...Guide 2006
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Sedky S. Post-Processing Techniques for Integrated MEMS 2006
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Handbook of MEMS for wireless and mobile applications 2013
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